【摘 要】
：
膜层稳定性对于激光器能否长期稳定使用极为重要。多孔SiO2减反膜经热处理后,结构中还存在许多Si-OH亲水基团,透过率稳定性受环境相对湿度的影响较大。向膜层中掺入有机硅,添
【机 构】
：
中国科学院上海光学精密机械研究所高功率激光物理国家实验室,中国科学院上海光学精密机械研究所高功率激光物理国家实验室 上海201800,上海201800
论文部分内容阅读
膜层稳定性对于激光器能否长期稳定使用极为重要。多孔SiO2减反膜经热处理后,结构中还存在许多Si-OH亲水基团,透过率稳定性受环境相对湿度的影响较大。向膜层中掺入有机硅,添加疏水基团,提高了膜层的疏水性,增强了膜层的透过率稳定性。膜层中加了Si-CH3疏水基团,膜层的疏水性大大提高;当Si-CH3与二氧化硅悬胶体中的Si的摩尔比为1/5.7时,即Si-CH3质量分数为0.35%时的二氧化硅膜层,其减反效果好,疏水性也高,从而大幅度提高了膜层的透过率稳定性,延长了膜层的寿命,对二氧化硅膜层具有高激光损伤阈值的性能没有影响。
The stability of the film is very important for the long-term stable use of the laser. Porous SiO2 anti-reflection film after heat treatment, the structure there are still many Si-OH hydrophilic groups, the transmittance stability by the relative humidity of the environment. Silicone is added to the film, hydrophobic groups are added to improve the hydrophobicity of the film and enhance the transmittance stability of the film. Si-CH3 hydrophobic group is added to the film, the hydrophobicity of the film is greatly improved; when the molar ratio of Si-CH3 to Si in the silica suspension is 1 / 5.7, that is, the mass fraction of Si-CH3 is 0.35 % Of the silica film, the anti-retrograde effect is good, hydrophobic is also high, thereby greatly improving the transmittance stability of the film, extending the life of the film, the silicon dioxide film has a high laser The damage threshold performance has no effect.
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