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采用液相沉积法在Al板上制备了TiO2纳米管阵列薄膜,并在不同温度下进行了热处理.用场发射扫描电子显微镜(FE-SEM)、透射电子显微镜(TEM)、X射线衍射(XRD)等手段对样品进行了表征.结果表明:未经过热处理的TiO2薄膜的晶体结构是非晶态的;在400℃的空气中焙烧2h,薄膜出现锐钛矿相;650℃空气中焙烧2h后,薄膜仍然保持着良好的管状结构.薄膜中Al2O3的存在,抑制了TiO2晶粒的长大,提高了薄膜的热稳定性.
TiO2 nanotube array thin films were prepared on Al plate by liquid-phase deposition method and were heat-treated at different temperatures. The structure of the films was characterized by field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), X-ray diffraction The results showed that the crystal structure of the TiO2 film was amorphous after calcined at 400 ℃ for 2h and the anatase phase appeared in the film after calcination at 650 ℃ for 2h. Still maintained a good tubular structure.The presence of Al2O3 in the film inhibited the growth of TiO2 grains and improved the thermal stability of the film.