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气敏传感器对促进科学技术发展、安全生产、环境保护等方面的重要作用及其广泛的应用性,早为国内学者和科技人员所关注。目前,研制气敏传感器的单位上百家,在品种开发和提高产品质量方面的研究也已取得较大进展。国际上一些主要的气敏传感器,例如MOS式、MOSFET式、接触燃烧式、固体电解质式、电化学式、热导式、振动式、电极式等等国内都有研究。此外,利用光纤、LB膜等新技术研究气敏的工作也正在进行。金属氧化物半导体式气敏传感器,由于它能检测的气体品种较多,且检测气体的浓度范围符合易燃、易爆气体LEL值的要求,气敏灵敏度亦较高,价格低廉,因此,和国外一样是研究和生产最多的一种气敏传感器。
The important role of gas sensors in promoting the development of science and technology, safe production and environmental protection and their wide applicability have long been the focus of domestic scholars and scientists. At present, there are hundreds of units that develop gas sensors and great progress has been made in the research on variety development and product quality improvement. Some of the major international gas sensors, such as MOS, MOSFET, contact combustion, solid electrolyte, electrochemical, thermal conductivity, vibration, electrode type and other domestic research. In addition, the use of optical fiber, LB film and other new technologies to study gas sensitivity is also under way. Metal oxide semiconductor gas sensor, because it can detect more gas species, and the detection of gas concentration range in line with the requirements of flammable and explosive gas LEL value, gas sensitivity is also high, the price is low, therefore, and Like foreign countries is the most research and production of a gas sensor.