论文部分内容阅读
一、前言 最近,在电子设备的系统控制,信息处理,节省能源和环境保护等方面迫切需要各种敏感器。其中半导体气体敏感器,若适当地选择基体材料以及在基体材料中加入催化剂等就能使其具有如下特性:(1)对被检测气体具有选择性,(2)其特性随气氛温度和湿度等的变化稳定,(3)响应速度快,(4)对低气体浓度有高的灵敏度,(5)可逆性,(6)灵敏度随时间稳定等。因此,正在进行积极研究。
I. INTRODUCTION Recently, there has been an urgent need for various sensors in terms of system control of electronic equipment, information processing, energy conservation and environmental protection. Among them, the semiconductor gas sensor can be made to have the following characteristics by appropriately selecting a base material and adding a catalyst into the base material: (1) selectivity to the gas to be detected, (2) its characteristics depending on the atmosphere temperature and humidity (3) fast response, (4) high sensitivity to low gas concentrations, (5) reversibility, and (6) sensitivity over time. Therefore, active research is underway.