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从光学性能仿真和结构版图设计两方面对基于微机电系统技术的分立式微变形镜进行了研究。以符合柯尔莫哥洛夫湍流统计理论的大气随机波前作为被校正对象,对方形排列、砖形排列和蜂窝形排列的三种分立式微变形镜进行了面形函数构建与波前校正仿真;从单元数量、控制电极、释放孔、弹性支撑梁和寻址线等方面给出了分立式微变形镜的结构、版图设计准则;最终采用两层多晶硅表面牺牲层工艺完成了一种方形排列37单元分立式微变形镜的制备,并对其镜面光学质量和电压-位移曲线进行了测试。
The discrete micro-deformable mirrors based on micro-electromechanical system technology are studied from the aspects of optical performance simulation and structure layout design. Taking the atmospheric random wave front which accords with the Kolmogorov turbulence statistical theory as the object to be corrected, the surface shape function and the wavefront correction simulation are carried out on three kinds of discrete micro-deformable mirrors with a square arrangement, a brick arrangement and a honeycomb arrangement The design principle of discrete micro-deformable mirror is given from the aspects of cell number, control electrode, release hole, elastic support beam and addressing line. Finally, a square arrangement is achieved by using two layers of polysilicon surface sacrificial layer process The preparation of unit discrete micro-deformable mirrors was studied, and the specular optical quality and voltage-displacement curve were tested.