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通过分析比较低压化学气相合成金刚石薄膜的大量试验方法及规律，认为非平衡条件下金刚石微晶形核长大应具备三个宏观条件：１）馈入足够高的能量；２）衬底表面应形成大的能量梯度；３）气氛中应含超平衡浓度的刻蚀剂，以有效的抑制非金刚石碳相的生长．在此基础上，对传统的类金刚石薄膜沉积工艺作如下改进：将衬底置于阳极上并增加射频功率密度和负偏压；保持沉积温度为室温；书混合气体中氩的含量提高到８０％以上．经透射电镜和喇曼光谱分析表明，本文所得到的类金刚石薄膜具有明显的金刚石结构特征．
By analyzing and comparing a large number of test methods and laws of low-pressure CVD diamond films, it is considered that there are three macroscopic conditions for diamond nucleation and growth under non-equilibrium conditions: 1) feeding a sufficiently high energy; 2) Forming a large energy gradient; 3) the atmosphere should contain ultra-equilibrium concentration of etchant, in order to effectively inhibit the growth of non-diamond carbon phase. On this basis, the conventional DLC thin film deposition process is improved as follows: placing the substrate on the anode and increasing the RF power density and negative bias; keeping the deposition temperature at room temperature; raising the content of argon in the book mixed gas to 80 %the above. Transmission electron microscopy and Raman spectroscopy analysis showed that the diamond-like carbon film obtained in this paper has obvious structural characteristics of diamond.