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低损耗激光薄膜反射镜是环形激光器谐振腔的关键元件之一,首先设计和制备了工作角度为45°的低损耗高反膜。为了提高低损耗高反膜的光学性能,采用高温热处理的方式,研究了热处理对低损耗高反膜的透射率、散射系数、表面粗糙度、相移等特性的影响。高温热处理对高反膜的散射系数、表面粗糙度影响较小,随着热处理温度的增加,高反膜相移逐渐降低。当退火温度为550℃时,环形激光器输出性能稳定性最好,当工作230 h后,输出能量仅下降到初始值的90.5%。实验结果表明,采用合适的热处理方式,可以有效改善低损耗高反膜特性以及环形激光器的输出性能。
Low loss laser thin film reflector is one of the key components of the ring laser resonator. Firstly, a low loss and high reflection film with working angle of 45 ° is designed and fabricated. In order to improve the optical properties of low loss and high antireflective film, the effects of heat treatment on the transmittance, scattering coefficient, surface roughness and phase shift of low loss and high antireflection film were investigated by high temperature heat treatment. The high temperature heat treatment has little effect on the scattering coefficient and surface roughness of high antireflective film. With the increase of heat treatment temperature, the phase shift of high antireflective film gradually decreases. When the annealing temperature is 550 ℃, the output stability of the ring laser is the best. After 230 h of operation, the output energy only drops to 90.5% of the initial value. The experimental results show that the proper heat treatment can effectively improve the performance of low loss and high reflection film and the output performance of ring laser.