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提出了一种新型半导体激光正弦相位调制干涉仪。使用此干涉仪测量了物体的微小振动。利用光热效应调制光源波长降低了光源光强变化引起的测量误差。模拟计算和实验结果证明了此干涉仪的有用性
A new type of semiconductor laser sinusoidal phase modulation interferometer is proposed. Use this interferometer to measure small vibrations of objects. Using the photothermal effect to modulate the wavelength of the light source reduces the measurement error caused by the change of the light intensity of the light source. Simulation results and experimental results demonstrate the usefulness of this interferometer