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对以过渡层、阻挡层和封填层组成的复合涂层的材料及其制备方法进行了探讨。确定了液态渗硅制备SiC阻档层,常压变温CVD制备SiC阻挡层和液相法制备SiW封填层的复合涂层制备工艺。研究了制备工艺参数对复合涂层防氧化性能的影响。
The materials of the composite coating composed of the transition layer, the barrier layer and the sealing layer and the preparation method thereof are discussed. The preparation technology of SiC barrier layer by liquid infiltration of silicon, SiC barrier layer by atmospheric pressure chemical vapor deposition (CVD) and the SiW sealing layer prepared by liquid-phase method were determined. The effects of preparation parameters on the oxidation resistance of composite coatings were studied.