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本文介绍了在微电子技术中广泛应用的光刻技术以及在微电子机械系统中颇有应用前景的LIGA技术、微立体光刻技术（MSL）的发展，并介绍了崭露头角的扫描隧道显微镜（STM）光刻及其纳米加工技术。
This article introduces the lithography techniques widely used in microelectronics and the promising applications of LIGA in microelectromechanical systems, the development of micro-stereolithography (MSL), and the introduction of the emerging scanning tunneling microscope (STM) Photolithography and nanotechnology.