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为了宣传和普及微细加工技术方面的知识,本刊应读者的要求,从今年一期起增辟微细加工技术讲座专栏。本期发表的《电子束曝光机》一文是该文译者在英国剑桥大学进修期间,根据美国科学出版社出版的《Electron—BeamTechnology in Microelectronic Fabrication》一书第三章”ElectronBeam Lithography Machine”中的内容编译的。该文详细地介绍了电子束曝光机的结构、主要功能和有代表性的光棚扫描、矢量扫描及变形束机的工作性能、设计方案以及作图模式等,对希望了解电子束曝光技术的人员,对已具备电子束曝光技术初步知识而又想进一步掌握机器原理、操作、设计考虑和发展动向的人员,是一份较好的学习教材,对从事这类机器研制的人员也很有参考价值。本刊将分期连续予以登载。
In order to promote and popularize the knowledge of microfabrication technology, we should add the column of microfabrication technology from the first issue of this year to the reader’s request. This issue of the “electron beam exposure machine,” a text is the translator at the University of Cambridge during the study, according to the American Science Press “Electron-BeamTechnology in Microelectronic Fabrication” a book in Chapter III “ElectronBeam Lithography Machine” Content compiled. This paper introduces the structure, main functions and the performance of the typical beam shedding, vector scanning and deformation beam machines, design schemes and drawing patterns, etc. Staff, already have a preliminary knowledge of electron beam exposure technology and want to further grasp the principle of the machine, operation, design considerations and development trends, is a good learning materials, engaged in the development of such personnel are also very reference value. This publication will be published in succession.