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金属或合金表面的导电或非导体镀层,对改善材料的性能,降低材料的损耗具有很大的作用。如在钢表面镀一层TiN,钢的抗磨损性能会得到提升。探讨各种元素在基体材料表面的分布和渗透行为,对新材料的研究具有十分重要的意义。本文运用直流辉光放电原子发射光谱对镀TiN和镀锌钢板进行了深度轮廓分析。放电电压、放电功率和压力对深度轮廓分析的影响进行了研究,在功率为24.5~28 W和500~1000 Pa放电压力下,可以得到每层4μm TiN的深度分辨率,并且Ti的谱线强度相对较高。结果表明在相对较低的放电功率和压力下,深度分辩较好。在优化操作条件下,即放电电压700 V,放电电流35~40 mA,Ar压力553 Pa,可以得到Ti的深度轮廓信息,在总深度为60μm的镀层中,以4μm的深度分辨率,Ti的含量从28%降低到0.02%。
Conductive or non-conductive coatings on metal or alloy surfaces have a significant role in improving material properties and reducing material loss. If coated with a layer of TiN steel, anti-wear properties of steel will be improved. It is of great significance to study the distribution and permeation behavior of various elements on the surface of matrix materials. In this paper, direct current glow discharge atomic emission spectrometry TiN and galvanized steel with a deep profile analysis. The influence of discharge voltage, discharge power and pressure on depth profile analysis was studied. At the power of 24.5-28 W and discharge pressure of 500-1000 Pa, the depth resolution of 4 μm TiN in each layer was obtained, and the spectral intensity of Ti Relatively high. The results show that the depth discrimination is better at relatively lower discharge power and pressure. Under the optimal operating conditions, namely discharge voltage of 700 V, discharge current of 35 ~ 40 mA, Ar pressure of 553 Pa, the depth profile of Ti can be obtained. In the total depth of 60μm coating, with a depth of 4μm resolution, Ti The content decreased from 28% to 0.02%.