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介绍了复杂型腔工件表面薄膜涂覆机理与技术特点,针对复杂工件镀膜过程中存在靶材消耗不均匀产生凹状侵蚀环、薄膜厚度不均匀致密等诸多问题,实验采用旋转式柱状磁控溅射靶,在镀膜机的不同位置安装多靶多材,靶能够自由旋转来实现定向镀膜需要;采用多个磁控溅射靶和设置辅助磁场对非平衡磁控溅射阴极靶的结构改进,提高真空镀膜室等离子体密度,进而提高溅射工件偏流实现沉积镀膜等系列创新研究,目的为实现在非同一平面内的,具有复杂外形和内腔结构的工件表面镀上厚度均匀、致密连续的功能性复合薄膜。
The mechanism and technical characteristics of the film coating on the surface of a complex cavity workpiece are introduced. Aiming at the problems of uneven erosion caused by uneven target consumption in the process of complex workpiece coating, the film thickness is not uniform and dense, many other problems are solved by rotating columnar magnetron sputtering Target, the multi-target multi-material can be installed at different positions of the coating machine and the target can be freely rotated for the purpose of directional coating; the structure improvement of the unbalanced magnetron sputtering cathode target by using a plurality of magnetron sputtering targets and the auxiliary magnetic field is improved Vacuum coating chamber plasma density, thereby increasing the sputtering artifact bias deposition deposition coating series of innovative research, in order to achieve in the same plane, with complex shape and cavity structure of the workpiece surface plated with uniform thickness, dense continuous function Sexual composite film.