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超精密加工技术,是以材料科学为基础制造工艺为中心的综合技术,对现代科学技术的发展起了重大的推动作用。 一、超精密加工的定义 什么是超精加工?究竟多大误差值才算超精密级?目前意见不一,且无明确的定义。国外有人将1～0.1μm定为精密加工;将0.1～0.01μm定为超精密加工(见日刊《精密机械》,1972,N02,津和秀夫的《超精密加工》一文)。日本在1975年提出“精密加工精度提案”
Ultra-precision machining technology, based on material science-based manufacturing technology as the center of integrated technology, has played a significant role in promoting the development of modern science and technology. First, the definition of ultra-precision machining What is superfinishing? How much error value is considered ultra-precision level? Currently different views, and no clear definition. Some people abroad will be 1 ~ 0.1μm as a precision machining; 0.1 ~ 0.01μm as ultra-precision machining (see the journal “Precision Machinery”, 1972, N02, Jin and Hideo’s “ultra-precision machining” article). Japan put forward in 1975 “precision machining precision proposal”