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科学与技术特种机构(STA)下属的日本科学与技术公司(JST)已经于近期开始一项计划,要在4年内实现0.04微米(40纳米)技术,与摩尔定律所预计的年限相比整整提前了10年之久。这项技术最初是由日本京都大学与富士通实验室合作开发的。最近在华盛顿召开的国际电子设备会议(IEDM)上,京都大学与富士通公司合作发表了一篇论文,其中提到使用一种称为簇离子束注入的方
Japan’s Science and Technology Corporation (JST), a division of the Specialized Agency for Science and Technology (STA), has recently begun a program to achieve 0.04-micron (40-nanometer) technology in four years, ahead of the expected number of years by Moore’s Law For 10 years. The technology was originally developed by Kyoto University in Japan and Fujitsu Laboratories. At the recent International Electronic Equipment Conference (IEDM) in Washington DC, Kyoto University and Fujitsu Ltd. published a paper in which they mentioned the use of a technique called cluster ion beam implantation