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最近,日本电信电话公司(NTT)研制成功观察原子层的电子显微镜,可用于实时观察半导体晶体表面的结晶生长过程,属世界首创。它由卧式电子显微镜、小型分子线生长装置、高速高灵敏度增幅器及显示屏组成,其模式如图所示。其中分子线生长装置的体积仅为现有产品的一半,已趋小型化。在电子显微镜下看到的表层原子层是一层宽广的凹凸不平的薄膜,最高分辨能力为30nm(1nm=10~(-6)mm),最高观察速度为每幅画面1/60s。利用这套
Recently, the successful development of atomic layer electron microscope by Japan National Telecommunication Telephone Corporation (NTT) is the first in the world to observe the crystal growth on the surface of semiconductor crystals in real time. It consists of horizontal electron microscope, a small molecular line growth device, high-speed high-sensitivity amplifier and the display, the mode as shown. Among them, the volume of molecular growth equipment is only half that of the existing products and has become miniaturized. The surface atomic layer seen under the electron microscope is a broad, rugged film with a maximum resolution of 30 nm (1 nm = 10 ~ (-6) mm) and a maximum observation speed of 1 / 60s per frame. Use this set