论文部分内容阅读
一、前言中空热阴极离子镀技术是在中空热阴极离子电子束和离子镀技术的基础上发展起来的。1963年Moley最先建立了中空热阴极放电技术,并用于熔炼、焊接、热处理等。尔后日本真空株式会社将其发展成最大达2400千瓦的熔炼设备。离子镀技术是Mattox最先发展起来的,它将辉光放电技术与蒸发镀膜技术结合起来,大大提高了涂层的性能。1971年Chamber等发展成型枪电子束离子镀。1972年Bunshah等发展成所谓的活性反
I. Introduction Hollow hot cathode ion plating technology is developed on the basis of hollow hot cathode ion beam and ion plating technology. 1963 Moley first established a hollow hot cathode discharge technology, and for melting, welding, heat treatment and so on. Nippon Vacuum Co., Ltd. later developed it into a smelting plant up to 2,400 kilowatts. Ion plating technology was first developed by Mattox, which combines glow discharge technology with evaporative coating technology to dramatically improve coating performance. 1971 Chamber and other development of gun electron beam ion plating. In 1972, Bunshah et al. Developed into the so-called reactivity