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作者根据径向圆光栅的特点,提出一种新的多相莫尔条纹补偿系统,采用单边补偿波形,对径消偏心,双排消轴晃影响,提高了系统的精度和稳定性。文中详细的叙述了补偿的原理和作用,并介绍了采用这一原理研制的21位增量编码器,给出了实验测试结果,最后对该系统的优缺点及读数头的布置等进行了讨论。
Based on the characteristics of radial circular grating, a new multi-phase moire fringe compensation system is proposed. The single-side compensation waveform is used to compensate for eccentricity of eccentricity and double anti-roll axis, which improves the accuracy and stability of the system. In this paper, the principle and role of compensation are described in detail, and the 21-bit incremental encoder developed by using this principle is introduced. The experimental results are given. Finally, the advantages and disadvantages of the system and the arrangement of readheads are discussed .