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本文用化学气相沉积法制备了ZnS薄膜和块材料；观察了ZnS在具有不同表面粗糙度的石墨和石英基体上的成核和长大行为；研究了沉积温度、H2S和Zn蒸汽流量对ZnS生长速率的影响规律．
In this paper, ZnS thin films and bulk materials were prepared by chemical vapor deposition. The nucleation and growth behavior of ZnS on graphite and quartz substrates with different surface roughness was observed. The effects of deposition temperature, flow rate of H2S and Zn on the growth of ZnS Rate of influence of law.