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利用磁控溅射法在K9玻璃基底上制备了SiN/Sb80Bi20/SiN相变薄膜结构,并利用连续He-Ne激光共焦Z-扫描技术同时测量了在激光作用下透射和反射非线性光学响应。实验结果表明,相变膜在激光焦点处的反射和透射信号由于薄膜的相变表现为非线性响应特性。薄膜在焦点处的透射信号强度随着扫描激光功率的增强逐渐增大直至饱和。这是由于在激光的作用下形成了相变微区,随着扫描功率的增加,相变区域逐渐变大引起的。对不同功率激光扫描后的样品进行了低于相变阈值的重复扫描实验,结果表明,相变区域具有较高的光热稳定性,说明BiSb相变薄膜具有相变数据存储潜在应用价值。
The SiN / Sb80Bi20 / SiN phase-change film structure was prepared on the K9 glass substrate by magnetron sputtering. The nonlinear He-Ne laser confocal Z-scan technique was used to measure the transmission and reflection nonlinear optical response . Experimental results show that the reflected and transmitted signals at the laser focal point of the phase change film exhibit non-linear response due to the phase transition of the film. The transmitted signal intensity at the focal point of the film gradually increases until it becomes saturated as the power of the scanning laser increases. This is due to the formation of the laser phase change micro-area, with the scan power increases, the phase transition area becomes larger. The results show that the phase transition region has high photothermal stability, indicating that BiSb phase change film has the potential application of phase change data storage.