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磁控溅射法制备了MoS2 /Sb2 O3 固体润滑复合膜 ,用CSEM摩擦试验机、CSEM纳米划痕仪和PHI- 5 70 2XPS/AES多功能电子能谱仪 ,考察了其摩擦磨损性能、抗损伤性能和抗氧化性能 ,侧重分析了薄膜失效的原因 ,探讨了该固体润滑复合膜润滑失效的微观机理
The MoS2 / Sb2 O3 solid lubricant composite membrane was prepared by magnetron sputtering method. The friction and wear properties, anti-friction and wear resistance of MoS2 / Sb2 O3 solid lubricant composite membrane were investigated by using CSEM friction tester, CSEM nano-scratch tester and PHI-5 70 2XPS / AES multifunctional electron spectrometer. Damage performance and anti-oxidation performance, focusing on the analysis of the causes of film failure, discussed the solid lubricant composite membrane lubrication failure of the micro-mechanism