论文部分内容阅读
本文叙述了应用微位移定位系统实现磁盘光刻伺服图形的精确定位,有效地提高磁盘存储器的道密度,这种方法将成为开发新一代大容量磁盘存储技术,有着良好的发展前景
This paper describes the application of micro-displacement positioning system to achieve the precise positioning of lithography servo graphics and effectively improve the channel density of disk storage. This method will be a new generation of high-capacity disk storage technology with good prospects for development