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将CMP技术用于Al-Mg合金表面加工中,根据抛光布特性及Al-Mg合金性质来选择抛光布。并从研究Al-Mg合金在碱性条件下化学机械抛光机理出发确定相应的抛光液,最后对Al-Mg合金化学机械抛光中pH值、压力、流量等主要参数进行优化实验。确定当压力为0.05 MPa,pH值为11.20,流量为250 ml/min时,Al-Mg合金表面状态良好。用美国ZYGO公司产的NewView6000非接触光学表面轮廓仪来测量表面粗糙度已达到纳米级别。
The CMP technology for Al-Mg alloy surface processing, polishing cloth characteristics and Al-Mg alloy properties to choose polishing cloth. And the Al-Mg alloy was studied on the basis of the mechanism of chemical mechanical polishing in alkaline condition to determine the corresponding polishing solution. Finally, the optimal parameters of pH, pressure, flow rate and other parameters in Al-Mg alloy chemical mechanical polishing were optimized. It is confirmed that the surface condition of Al-Mg alloy is good when the pressure is 0.05 MPa, the pH value is 11.20 and the flow rate is 250 ml / min. Using the NewView6000 non-contact optical surface profilometer manufactured by ZYGO Corporation, the surface roughness has been measured to nanometer level.