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系统地研究了MgF2衬底上类金刚石薄膜的折射率和生长速率与淀积工艺之间的关系,在MgF2衬底上成功地设计并制备了红外增透和保护膜。理论与实验研究表明,类金刚石薄膜使MgF2的红外透过率提高3%以上是完全可能的,但起红外增透和保护双重作用的统一性问题仍有待进一步研究。
The relationship between the refractive index and the growth rate of the diamond-like carbon film on the MgF2 substrate and the deposition process has been systematically studied. The infrared-enhanced and protective film has been successfully designed and prepared on the MgF2 substrate. Theoretical and experimental studies show that diamond-like carbon films can increase the infrared transmittance of MgF2 by more than 3%. However, the unification of the dual functions of IR enhancement and protection remains to be further studied.