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用射频溅射方法在较高氧压下沉积的多晶的ZnO薄膜,其光响应主要由两部分组成:第一部分来源于膜内晶粒界面所吸附氧原子的光脱附,该部分光响应可使膜的电导率增加两个数量级且响应速度较快;第二部分来源于薄膜表面所吸附氧原子的光脱附,此光响应可使膜的电导率增加4一5个数量级,但响应速度非常缓慢.两部分光响应都来自薄膜的结构变化,膜的结构变化与膜所处环境中气体的种类,压强以及膜的温度有关.
The polycrystalline ZnO thin films deposited by RF sputtering at higher oxygen pressure consist mainly of two parts: the first part is derived from the photo-desorption of oxygen atoms adsorbed by the grain boundary in the film, and the part of the photo-response The conductivity of the membrane can be increased by two orders of magnitude and the response speed is faster. The second part is the photo-desorption of oxygen atoms adsorbed on the membrane surface. The photoresponse can increase the conductivity of the membrane by 4 to 5 orders of magnitude, The speed of light is very slow.The two-part light response comes from the structural change of the film, and the structural change of the film is related to the type of gas, the pressure and the temperature of the film in the environment in which the film is located.