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设计并制作了一种具有8个位相级的二元光学器件,将波长为10．6μmCO_2激光器输出的圆形光斑变换成均匀光强分布的矩形光斑。器件制作在GaAs基片上,两面镀有光学增透膜,适用于2000W的大功率激光加工系统中。此器件可以根据需要设计成不同规格。
A binary optical device with 8-order phase was designed and fabricated. The circular spot output from a 10.6μm CO 2 laser was transformed into a rectangular light spot with uniform intensity distribution. Devices fabricated on GaAs substrate, coated with an optical antireflection film on both sides, suitable for 2000W high-power laser processing system. This device can be designed according to different specifications.