Synthesis and Characterization of Air-Stable Elemental Fe Thin Films by Chemical Vapor Deposition of

• 作 者: On Mero Nava Shpaisman Judith
• 机 构: InstituteofNanotechnologyandAdvancedMaterials
• 出 处: 表面工程材料与先进技术期刊(英文)
• 发表日期: 2013年3期
• 关键词: MAGNETIC Conductive THIN Coatings THIN FE FILMS Nanogranular MAGNETIC THIN FILMS

New magnetic air-stable nanogranular Fe thin films of 10 ± 1.2 nm thickness were prepared onto silicon wafers at 150℃ under inert atmosphere by controlled Chemical Vapor Deposition (CVD) of triiron dodecacarbonyl (Fe3(CO)12). These thin films, compos