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根据国内医疗应用市场对电子听诊器的需求,结合压阻原理与MEMS加工技术设计了一种具有体积小、灵敏度高等优点的MEMS电子听诊器。该听诊器可通过内部MEMS微结构接收心音并完成声电换能,所产生的电信号可方便地由后端电路进行采集与存储。首先建立微结构的力学模型,根据应用需求设计微结构的尺寸参数;其次通过有限元软件进行仿真验证;最后加工制作出听诊器样机并进行测试。测试结果表明该种MEMS听诊器可有效获取心音信号并将其转化为电信号。将MEMS压阻式传感器应用于临床听诊为心音采集提出了一种新思路,具有广泛的应用前景。
According to the demand of electronic stethoscope in domestic medical application market, a MEMS electronic stethoscope with small volume and high sensitivity is designed based on piezoresistive principle and MEMS processing technology. The stethoscope can receive the heart sound through the internal MEMS micro-structure and complete the electro-acoustic transduction, and the generated electrical signals can be conveniently collected and stored by the back-end circuit. Firstly, the mechanical model of microstructure is established, and the size parameters of microstructure are designed according to the application requirements. Secondly, the finite element software is used to verify the simulation results. Finally, the prototype of the stethoscope is fabricated and tested. Test results show that the kind of MEMS stethoscope can effectively obtain the heart sound signal and convert it into electrical signals. The application of MEMS piezoresistive sensor in clinical auscultation presents a new idea for heart sound acquisition, which has a wide range of applications.