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利用建立的常规光刻法的纳米加工工艺系统 ,研制碳纳米管晶体管、单电子晶体管和单电子晶体集成的纳米器件 .研制出了 90K的单电子晶体管 ,实现了两单电子晶体管的电容耦合集成、多个单电子晶体管的串联集成以及单电子晶体管与传统器件的集成
The nano-fabrication process system of conventional photolithography was used to fabricate carbon nanotube transistors, single-electron transistors and single-crystal integrated nanodevices. A 90K single-electron transistor was developed to realize the capacitive coupling of two single-electron transistors , Series integration of multiple single-electron transistors, and integration of single-electron transistors with legacy devices