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为了提高空间固体润滑滚动轴承耐磨寿命,采用全方位离子注入和磁控溅射技术对空间固体润滑轴承用9Cr18材料进行耐磨减摩表面改性研究。首先对9Cr18不锈钢试样表面注入N+、Ti+、Ti++N+,对离子注入后试样采用磁控溅射技术沉积MoS2-Ti薄膜。通过测试注入前后试样粗糙度及硬度,评价不同注入离子及无离子注入不同基底材料下溅射MoS2-Ti薄膜的附着力、真空摩擦学、薄膜磨损率等性能。结果表明离子注入通过提高9Cr18不锈钢基底硬度,能够提高复合改性后9Cr18不锈钢材料真空摩擦学性能20%。
In order to improve the wear life of space solid lubricated rolling bearing, the wear resistance and friction reducing surface modification of 9Cr18 material for space solid lubricating bearings was studied by using all-around ion implantation and magnetron sputtering technology. Firstly, N +, Ti + and Ti ++ N + were implanted into the surface of 9Cr18 stainless steel, and MoS2-Ti films were deposited by magnetron sputtering after ion implantation. The properties of MoS2-Ti thin films such as adhesion, vacuum tribology and film wear rate were evaluated by testing the roughness and hardness of the samples before and after injection. The results show that by increasing the hardness of 9Cr18 stainless steel substrate by ion implantation, the vacuum tribological properties of 9Cr18 stainless steel can be improved by 20%.