论文部分内容阅读
采用溶胶－凝胶（Ｓｏｌ－ｇｅｌ）技术制备了ＳｉＯ２－ＴｉＯ２低损耗平面光波导，在６３３ｎｍ处的传输损耗为０．５７ｄＢ／ｃｍ。同时在硅基板上制备了脊型Ｙ形波导分束器，分束比为１１。
The SiO2-TiO2 low-loss planar optical waveguide was prepared by sol-gel technique with a transmission loss of 0.57 dB / cm at 633 nm. At the same time, a ridge Y-shaped waveguide beamsplitter was fabricated on a silicon substrate with a splitting ratio of 11.