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在外部电容耦合装置中进行了γ-氨丙基三乙氧基硅烷(APTEOS)的聚合,研究了系统的压力、放电功率、基片距离和等离子气体对聚合膜淀积速率以及对聚合物的结构与性能的影响。应用元素分析、红外光谱、X射线衍射研究了聚合物的结构,并测定了热失重、接触角和表面能。
The polymerization of γ-aminopropyltriethoxysilane (APTEOS) was carried out in an external capacitive coupling device. The effects of pressure, discharge power, substrate distance and deposition rate of plasma gas on the deposition rate of the polymer film, Effect of structure and performance. The structure of the polymer has been studied by elemental analysis, infrared spectroscopy and X-ray diffraction. The weight loss, the contact angle and the surface energy have also been determined.