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为探寻Al靶功率对CrAlN涂层性能的直接影响,利用直流反应磁控溅射的方法在304不锈钢基体上沉积CrAlN涂层,并研究不同Al靶功率对CrAlN涂层组织结构与摩擦性能的影响.采用SEM、XRD、AFM、往复摩擦磨损试验机、显微硬度计、三维轮廓仪对试样的物相组成、表面形貌、摩擦磨损性能、硬度和磨痕形貌进行表征.结果表明:随着Al靶功率的增加,CrAlN涂层的晶粒尺寸呈现轻微的先增大后减小的规律,Al靶功率为180 W时的晶粒尺寸最小;随着Al靶功率的增加,显微硬度、平均沉积速率呈现先增大后减小的规律而磨痕深度、平均体积磨损率呈现出相反的变化趋势.经综合比较,Al靶功率为150 W时CrAlN涂层的综合性能较优.
In order to investigate the direct effect of Al target power on the properties of CrAlN coatings, CrAlN coatings were deposited on 304 stainless steel substrates by DC reactive magnetron sputtering and the effect of different Al target powers on the microstructure and tribological properties of CrAlN coatings The phase composition, surface morphology, friction and wear properties, hardness and wear scar morphology of the samples were characterized by SEM, XRD, AFM, reciprocating friction and wear tester, microhardness tester and three-dimensional profiler.The results showed that: With the increase of Al target power, the grain size of CrAlN coatings increases slightly first and then decreases, and the grain size of the CrAlN coating is the smallest when the Al target power is 180 W. With the increase of Al target power, Hardness and average deposition rate increase firstly and then decrease and the depth of wear scar increases with the average volumetric wear rate changing trend.A comprehensive comparison shows that the comprehensive performance of CrAlN coating is better when Al target power is 150 W.