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直接采样的高分辨辉光放电质谱(GDMS)是当今高纯固体常规分析中可用的高灵敏度分析方法之一。这种多元素分析技术通常用于主量化学成分的定量分析、监测元素质量分数随微米级深度(深度分布)的变化,或用于对多种固体和镀层上肉眼可见体积的高灵敏度的分布研究,包括纯金属、高温合金、陶瓷或其中陶瓷金属。由于GDMS的检测几乎涵盖了所有方法,因此在监测痕量级的多元素含量方面是最具成本优势的。另外,它使对在包含绝缘层和(或)镀层及两者化合物的平面上的高灵敏度的含量深度分布分析成为可能。本文着重介绍直流辉光质谱技术用于监测痕量至超含量元素分析技术目前的进展以及直接采样分析实践中应当采用的策略。
Direct sampling of high resolution glow discharge mass spectrometry (GDMS) is one of the most sensitive analytical methods available for routine analysis of high purity solids today. This multivariate analysis technique is commonly used for quantitative analysis of the chemical composition of the main mass, for monitoring changes in the elemental mass fraction as a function of micron depth (depth distribution) or for high sensitivity to the macroscopic volume of various solids and coatings Research, including pure metals, superalloys, ceramics or ceramic metal which. Since GDMS covers almost all methods, it is the most cost-effective to monitor trace-level multi-element content. In addition, it makes it possible to analyze the depth profiles of highly sensitive contents in the plane containing the insulating layer and / or the plating and the two compounds. This article focuses on the current progress of direct-flow glow mass spectrometry for the trace-to-super-elemental elemental analysis and the strategies that should be used in direct sampling analysis.