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采用电弧离子镀方法制备了不同厚度TiN薄膜,并对其硬度、结合力、残余应力、摩擦磨损特性等力学性能进行了系统性研究,以揭示硬质薄膜厚度对其力学性能的影响规律。结果表明,随着厚度增加,薄膜表面大颗粒增加,膜基界面剪切力增大,薄膜硬度逐渐增加,结合力逐渐下降,摩擦系数略有下降;而薄膜应力沿层深分布趋势基本一致,都呈钟罩形分布;磨损率随薄膜厚度变化不大,即薄膜越厚越耐磨。
TiN thin films with different thicknesses were prepared by arc ion plating. The mechanical properties such as hardness, cohesion, residual stress and friction and wear properties were systematically studied to reveal the influence of hardness on the mechanical properties. The results show that as the thickness increases, the large particles on the surface of the film increase, the shear force at the interface of the film increases, the hardness of the film increases gradually, the binding force decreases gradually and the friction coefficient decreases slightly; while the stress distribution of the film along the layer is basically the same, Bell-shaped distribution; the wear rate changes little with the film thickness, that is, the thicker the film, the more wear-resistant.