【摘 要】
：
Sn-doped Ge2Sb2 Te5 thin films deposited on Si(100)/SiO2 substrates by rf magnetron sputtering are investigatedby a differential scanning calorimeter, x-ray dif
【机 构】
：
Research Center of Functional Semiconductor Film Engineering and Technology, Shanghai Institute of M
论文部分内容阅读
Sn-doped Ge2Sb2 Te5 thin films deposited on Si(100)/SiO2 substrates by rf magnetron sputtering are investigatedby a differential scanning calorimeter, x-ray diffraction and sheet resistance measurement. The crystallizationtemperatures of the 3.58 at. %, 6.92 at. % and 10.04 at. % Sn-doped Ge2Sb2 Te5 thin films have decreases of 5.3,6.1 and 0.9 ℃, respectively, which is beneficial to reduce the switching current for the amorphous-to-crystallinephase transition. Due to Sn-doping, the sheet resistance of crystalline Ge2Sb2 Te5 thin films increases about 2-10times, which may be useful to reduce the switching current for the amorphous-to-crystalline phase change. Inaddition, an obvious decreasing dispersibility for the sheet resistance of Sn-doped Ge2Sb2 Te5 thin films in thecrystalline state has been observed, which can play an important role in minimizing resistance difference for thephase-change memory cell element arrays.
其他文献
Electronic structure of SmCo7- xHfx compound is calculated by using the multi-scattering X α method. It is shownthat a few of electrons can transfer to the Sm
Magnetic anisotropy evolution of ultrathin Fe films grown on Pt(001) single-crystal surface is investigated by UHVin situ surface magneto-optical Kerr effect (S
全世界动物中，95%都有眼睛，或者有类似眼睛的用于感觉光线的器官，但对于眼睛究竟是怎样进化来的，科学界一直只有理论，没有实验数据，而这，向来是宗教攻击达尔文进化论的理由。 在科幻电影《I型起源》的开头，剧中的科学家就介绍了眼睛研究的现状与困境。电影所说的确实是事实。1859年，达尔文在《物种起源》第六章《理论的难题》的“极其完美和复杂的器官”这一节中写道：“眼睛有调节焦距、允许不同采光量和纠正球
We prepare TeOx thin films by vacuum evaporation of TeO2 powder. It is found that the as-deposited TeOx films can represent a two-component system comprising cr
近些年,随着啤酒消费量的不断增加,啤酒大麦需求量越来越大,从而带动了啤酒大麦生产的发展。我场于1982年开始调整了种植业结构,增加了大麦种植面积,同时对大麦的特性及高产
小麦夏玉米两熟连作制是丰县1980年以后采用的主要耕作栽培制度,目前已发展到60万亩左右,其产量约占全县粮食总产量的70％左右。但是,由于两熟连作茬口紧张,互相影响,如小麦播
Raman-scattering spectra in SnO2 nanorods with different diameters were obtained at room temperature and the low-frequency Raman peaks have been observed for th
We introduce a novel method for sandwiched-composite-film encapsulation that successfully extends the lifetime of flexible organic light-emitting diodes (FOLEDs
We demonstrate the preparation of composite photovoltaic devices by using the blends of multi-armed CdS nanorods with conjugated polymer, poly[2-methoxy-5-(2-e
本文利用改进的“反向传播”神经网络模型,在滴定突跃附近,建立了E-V曲线的神经网络插值模型,由其二阶微商求得滴定终点。计算实例中,拟合最大相对误差不超过0.1％,计算机CPU时