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随着微电子机械系统(MEMS,MicroElectroMechanicalSystem)研究的深入和产业化的需求,其检测在MEMS中的重要性越来越大。光学检测方法以其非接触、快速、高精度等优点得到了大量的应用。分析和介绍了国内外采用光学检测法进行MEMS检测的方法及相关检测仪器在测量中的应用。尤其是Nanosurf测量仪器,它是一种独立的三维非接触测量系统,扫描共焦显微镜是基于白光共焦技术,强大且友好的软件控制使所需获得的数据不仅速度快,而且精度很高,并且提供了多种不同的表面分析方法。
With the deepening and industrialization of Microelectromechanical System (MEMS) research, the importance of its detection in MEMS is getting bigger and bigger. Optical detection methods for its non-contact, fast, high precision and other advantages have been a large number of applications. Analyzed and introduced the methods of using optical detection method for MEMS detection at home and abroad and the application of related detection instruments in the measurement. Especially Nanosurf measuring instrument, which is a kind of independent three-dimensional non-contact measuring system. Scanning confocal microscope is based on white-light confocal technology. The powerful and friendly software control makes the required data not only fast but also with high precision, And provides a variety of different surface analysis methods.