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本文讨论了标准漏孔的校准方法,介绍了一台可供原始标准漏孔校准的真空系统的 设计,导出了量测误差的公式,并进行了量测误差的分析。根据大中给出的一组曲线, 可综合考虑被校漏孔的漏量,量测精度、量测真空度的选择和所需量测时间的关系。 对于10-6-10-7 毫升/秒量级的漏孔,漏量校准值的误差可低于 10%,因此可以 在此范围内进行原始标准漏孔的研究。
This paper discusses the calibration method of standard leaky hole, introduces the design of a vacuum system that can calibrate the original standard leaky hole, deduces the formula of measurement error, and analyzes the measurement error. According to a set of curves given by Dazhong, we can consider the leakage of the leaky hole, the measurement accuracy, the choice of measurement vacuum and the relationship between the required measurement time. For leaks on the order of 10-6-10-7 ml / sec, the error of the leak calibration can be less than 10%, so the study of the original standard leaks can be done in this range.