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介绍两种结构形式的基于电子隧道效应的纳米级三维轮廓仪。其纵向分辨率可达０．０２ｎｍ，横向分辨率可达０．２ｎｍ，扫描范围分别为４０μｍ×４０μｍ和１４μｍ×１４０μｍ。可直接对φ５０ｍｍ和φ１３０ｍｍ的大尺寸样品表面进行纳米级的超微观形貌检测与分析。文中给出了一些超精表面的超微观形貌测量的结果。
This paper introduces two kinds of structure-based nanometer three-dimensional profilers based on electron tunneling. The vertical resolution of up to 0.02nm, horizontal resolution of up to 0.2nm, scanning range were 40μm × 40μm and 14μm × 140μm. Directly on the φ50mm and φ130mm large-size sample surface nano-scale ultra-micro-morphology detection and analysis. Some superfine surface morphology measurements are given in this paper.