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在光交换、光互连及光盘等领域,传感技术和微动控制技术是不可缺少的一部分。对此,我们开发了以光为媒介的微机械和电子技术融为一体的机械光电子学技术。其中(1)微机械加工、(2)光压微动控制技术、(3)微能技术、(4)智能材料等是机械光电子学中不可缺少的关键技术。本文从光的力学作用和物质转换作用的角度,介绍了机械光电子学关键技术的研究状况,即与(1)相关的,利用激光热激励振动,然后采用光干涉检测该振动的光激励振动器的制作方法和特性;与(2)相关的,利用光压(辐射压)使形状各向异性物体旋转驱动;与(3)相关的,用于光能和化学能转换的光充电二次空气电池。无论哪项研究,目前均已确定了其工作原理,初步设计已取得了令人满意的效果。
In optical switching, optical interconnection and optical disks and other fields, sensing technology and micro-control technology is an indispensable part. In response, we have developed a mechanical optoelectronic technology that integrates light-mediated micromechanics and electronics. Among them, (1) micromachining, (2) light pressure micro-control technology, (3) micro-energy technology, (4) smart materials and other mechanical optoelectronics is an indispensable key technology. In this paper, the research status of the key technologies of mechanical optoelectronics is introduced from the perspective of the mechanics of light and material conversion. That is to say, (1) related to the use of laser thermal excitation of vibration, and then the use of optical interference to detect the vibration of the optical excitation vibrator Related to (2) the use of light pressure (radiation pressure) to shape-shaped anisotropic rotation of the object; and (3) for the light energy and chemical conversion of the light-charged secondary air battery. No matter what the study, have confirmed its working principle, the preliminary design has achieved satisfactory results.