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利用具有相反热光特性的氮氧化硅(SiON)与聚合物材料,采用混合集成技术设计了一种低功耗全内反射(TIR)热光波导开关。该光开关通过在两交叉的氮氧化硅波导芯的X结中心部分制作一个深度等于波导芯厚度的狭缝,并在其中填充与波导包层相同的聚合物材料,同时在狭缝聚合物上方制作加热电极来实现开关功能。理论分析表明,通过选择与氮氧化硅折射率相匹配的聚合物材料,并优化设计单模光波导尺寸,两交叉波导间的夹角、所开狭缝的宽度以及相应的加热电极结构,对于1550nm的工作波长,开关的驱动功率在低至2.3mW时仍可实现消光比均大于36dB,串扰均小于-36dB的TE与TM模式。
Using a silicon nitride oxide (SiON) and polymer materials with opposite thermal characteristics, a low power consumption total internal reflection (TIR) thermo-optic waveguide switch was designed using hybrid integration technology. The optical switch is fabricated by making a slit having a depth equal to the thickness of the waveguide core at the center of the X junction of the two crossed silicon oxynitride waveguide cores and filling therein the same polymer material as the waveguide cladding while being over the slit polymer Making heating electrodes to achieve the switching function. The theoretical analysis shows that by choosing a polymer material that matches the refractive index of silicon oxynitride and optimizing the size of the single-mode optical waveguide, the angle between the two crossed waveguides, the width of the slit, and the corresponding heater electrode structure, 1550nm working wavelength, the driving power of the switch can still achieve the TE and TM modes with the extinction ratio greater than 36dB and the crosstalk less than -36dB as low as 2.3mW.