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阐述了高选择ＣＨ４气敏元件的制造工艺，发现Ａｕ，Ｐｔ，Ｐｄ等金属超细粉的掺杂，可提高元件的抗干扰能力，对Ｃ２Ｈ５ＯＨ，Ｈ２，ＣＯ等干扰气体灵敏度＜２，而对ＣＨ４的灵敏度＞８．经２年多稳定性考核，＼Ｒ０≤±１０％，对金属超细粉在ＳｎＯ２晶粒表面状态进行了分析和探讨．
The manufacturing process of high selectivity CH4 gas sensor is described. It is found that the doping of Au, Pt, Pd and other metal ultrafine powders can improve the antijamming ability of the device, and the sensitivity to interference gases such as C2H5OH, H2, CO is less than 2, CH4 sensitivity> 8. After more than two years of stability assessment, R0 ≤ ± 10%, the metal surface morphology of the ultrafine powder in the SnO2 were analyzed and discussed.