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通过检测原子团离于MCs+和MAs－（M是基体元素）对AlxGa1-xAs基体组分进行了定量的分析，考察了MIQ－156SIMS上所测这些原子团离子的能量分布及其对分析结果的影响，并对正、负SIMS测量方法做出比较。
Through the quantitative analysis of the matrix components of AlxGa1-xAs by detecting the dissociation of the radicals from MCs + and MAs- (M is the matrix element), the energy distributions of the ions of these clusters measured at MIQ-156SIMS and their influence on the analysis results were investigated. And the positive and negative SIMS measurement methods to make a comparison.