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利用傅利叶变换喇曼散射技术研究了CdTe表面的Raman散射谱,观察到了CdTe表面光学声子(TO、LO)的一级、二级斯托克斯、反斯托克斯Raman散射峰。实验同时还研究了经过机械抛光、化学机械抛光、化学腐蚀等不同表面处理后的CdTeRaman散射谱。实验表明Raman散射方法除可以用来表征晶体表面的完整性外,还能有效地探测样品的表面沾污情况。总的来说Raman散射技术有希望成为器件工艺过程中的一种表面无损检测手段。
The Raman scattering spectra of CdTe surface were investigated by Fourier transform Raman scattering. The first-order, second-order Stokes and anti-Stokes Raman scattering peaks of CdTe surface optical phonon (TO, LO) were observed. At the same time, we also studied the CdTeRaman scattering spectra after different surface treatments, such as mechanical polishing, chemical mechanical polishing and chemical etching. Experiments show that Raman scattering method can not only be used to characterize the integrity of the crystal surface, but also effectively detect the surface of the sample contamination. In general, Raman scattering is promising as a non-destructive method for surface inspection of devices.