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针对通信波段设计并制作了楔形波导层的导模共振滤波片(GMRF),分析并研究了其光谱特性。采用三角掩模板的方法进行离子束刻蚀,刻蚀一定次数后获得楔形波导层。光栅线条方向分为平行于和垂直于楔形波导层变化的方向。实验结果表明,对于两种结构,共振峰的位置与滤波片上的位置呈近似线性关系。光栅刻槽平行于楔形层变化的方向时共振峰的半峰全宽较光栅刻槽垂直于楔形层变化的方向时大。最终在20mm的样品上,获得了线性渐变的Ta_2O_5楔形薄膜,其反射谱在1560~1600nm范围内近似于线性变化。
The guided-mode resonance filter (GMRF) of wedge-shaped waveguide was designed and fabricated for the communication band, and its spectral characteristics were analyzed and studied. The method of using the triangular mask is used to perform the ion beam etching, and the wedge-shaped waveguide layer is obtained after being etched for a certain number of times. The raster line direction is divided into directions that are parallel to and perpendicular to the wedge-shaped waveguide layer. Experimental results show that, for both structures, the position of the formant is approximately linear with the position on the filter. The full width at half maximum of the formant when the grating grooves are parallel to the changing direction of the wedging layer is larger than the direction of the grating groove perpendicular to the changing direction of the wedging layer. Finally, a linear tapered Ta_2O_5 wedge film was obtained on a 20 mm sample, and its reflection spectrum was approximately linear in the range of 1560 ~ 1600 nm.