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AISI H13 steel samples were plasma nitrided to improve their surface hardness using a locally developed combined reactor.Pre-ionized RFICP plasma was employed in combination with DC glow discharge and thermal emission source to achieve the nitride precipitates in iron-matrix under low sample temperature.Thick nitride layers over 150 microns could be realized with low RF power of 100 W under the processing time between 1-20 h and low sample temperature of 300℃.The gas mixtures of H2 and N2 were utilized while the processing pressure and the DC bias to the sample were maintained at 0.5 torr and 300 V,respectively.Scanning electron microscope(SEM),energy dispersive X-ray spectroscopy(EDS),glancing incident angle X-ray diffractometer(GIXD)and Vickers hardness test were employed to characterize the properties of sample surfaces.Significant increases of surface hardness to over 1,000 HV were observed after treatment.
AISI H13 steel samples were plasma nitrided to improve their surface hardness using a locally developed combined reactor. Pre-ionized RFICP plasma was employed in combination with DC glow discharge and thermal emission source to achieve the nitride precipitates in iron-matrix under low sample temperature. Thick nitride layers over 150 microns could be realized with low RF power of 100 W under the processing time between 1-20 h and low sample temperature of 300 ° C. The gas mixtures of H2 and N2 were utilized while the processing bias and the DC bias to the sample were maintained at 0.5 torr and 300 V, respectively. Scanning electron microscope (SEM), energy dispersive X-ray spectroscopy (EDS), glancing incident angle X-ray diffractometer (GIXD) and Vickers hardness test were employed to characterize the properties of sample surfaces. Significant increases of surface hardness to over 1,000 HV were observed after treatment.