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The trichlorosilane (TCS) purification process consumes a significant amount of energy to achieve the high purity requirement for TCS quality (99.9999％). This work proposed a series of energy saving technology to enhance the TCS purification process, including the conventional process, the conventional process coupled with heat-pump (HP), the multi-effect distillation process, and the dividing-wall columns process. All proposed schemes have been conceptually con-structed by Aspen Plus. The design and optimization of the processes have been performed by the sensitivity analysis and the response surface methodology. Moreover, the energy consumption and total annual cost (TAC) for these schemes were discussed. The simulation results show that the TAC of the conventional process coupled with the integrated heat pump can reduce 50.5％ of energy consumption as compared with the conventional process; the double-effect and three-effect pro-cesses can save 15.6％ and 33.8％ of energy consumption, respectively; the dividing wall column process and that coupled with the heat pump process can reduce by 22.3％ and 48.1％ of energy consumption, respectively. It can be found that the operating cost can be saved by using the heat pump technology, while the capital cost increases due to the investment in the compressor, when the processes coupled with the heat pump are used. These results demonstrate that the conventional process coupled with the HP technology has advantages over other distillation schemes for TCS purification in terms of the energy saving and economic effects.