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采用磁控溅射方法制备了厚度小于1μm的Ni-Cr桥膜(w_(Ni):80%,w_(Cr):20%),研究了退火处理对不同厚度桥膜的电阻和电阻温度系数的影响。结果表明:当桥膜厚度较大时,退火导致电阻温度系数明显增大;当桥膜厚度较小时,退火对电阻温度系数影响不大。
The Ni-Cr bridge (w_ (Ni): 80% and w_ (Cr): 20%) with thicknesses less than 1μm were prepared by magnetron sputtering. The effects of annealing treatment on the resistance and the temperature coefficient of resistance Impact. The results show that when the thickness of the bridge membrane is large, the temperature coefficient of resistance increases obviously when the thickness of the bridge membrane is large. When the thickness of the bridge membrane is small, the annealing has little effect on the temperature coefficient of resistance.