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报道了采用高压射频等离子体增强化学气相沉积(RF-PECVD)制备高效率单结微晶硅电池和非晶硅/微晶硅叠层电池时几个关键问题的研究结果,主要包括:1)器件质量级本征微晶硅材料工艺窗口的确定及其结构和光电性能表征;2)孵化层的形成机理以及减小孵化层的有效方法;3)氢稀释调制技术对本征层晶化率分布及其对提高电池性能的作用;4)高电导、高晶化率的微晶硅p型窗口层材料的获得,及其对减小微晶硅电池p/i界面孵化层厚度和提高电池性能的作用等.在解决上述问题的基础上,采用高压RF-PECVD制备的单结微晶硅电池效率达8.16%,非晶硅/微晶硅叠层电池效率11.61%.
This paper reports the results of several key issues in the preparation of high efficiency single junction microcrystalline silicon cells and amorphous silicon / microcrystalline silicon laminated cells by RF-PECVD, including 1) 2) the formation mechanism of incubation layer and the effective method of reducing hatching layer; 3) the hydrogen dilution modulation technique to the crystallization of the intrinsic layer distribution rate And its effect on improving battery performance; 4) obtaining microcrystalline silicon p-type window layer materials with high conductivity and high crystallization rate and their effects on reducing the thickness of the p / i interface hatching layer and improving the battery performance of the microcrystalline silicon battery Etc. On the basis of solving the above problems, the efficiency of single-junction microcrystalline silicon cell prepared by high-pressure RF-PECVD is 8.16%, and the efficiency of amorphous silicon / microcrystalline silicon laminated cell is 11.61%.