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本文首先从光学测量的实用角度出发,列出部分相干光下成象非线性的理论要点,然后介绍了近年来的研究成果,即:部分相干光下位相细节的出现及其对实验的干扰,光学系统分辩率随照明而变化的情况,直边位移、线宽的不确定性及其在大规模集成电路线条测量中的应用,光学传递函数的含糊性及其对测量的影响,显徽密度测量中线性工作范围的确定,以及光谱测量中的非线性现象。
In this paper, firstly, the theoretical points of imaging nonlinearity under partially coherent light are listed from the practical point of view of optical measurement, and then the research results in recent years are introduced. The appearance of phase detail under partially coherent light and its interference with experiment, Optical system resolution changes with illumination, straight edge displacement, linewidth uncertainty and its application in large scale integrated circuit line measurement, the ambiguity of the optical transfer function and its impact on the measurement, the apparent density The determination of the linear working range in the measurement, as well as the non-linear phenomena in the spectrometric measurement.